Paper
17 January 2008 Image sensor and its application in vibration distribution measurement
Guotian He, Chaowei Tang, Changbiao Xu, Li Wang, Xiaolong Li
Author Affiliations +
Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67235Q (2008) https://doi.org/10.1117/12.783799
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
Aimed at the research actuality of displacement distribution measurement of each point at the measured object surface in condition of micro-motion, we developed a high-speed image sensor based on low-speed CCD in this paper, which can be used for vibration measurement. The operating principle of the sensor and the collecting principle of synchronization data are analyzed. The sensor combined with sinusoidal phase-modulating (SPM) interferometry was used in vibration distribution measurement. Thus each vibration displacement of the measured object surface was gotten. So the displacement distribution measurement of a low cost, high-speed and high precision was realized.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guotian He, Chaowei Tang, Changbiao Xu, Li Wang, and Xiaolong Li "Image sensor and its application in vibration distribution measurement", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235Q (17 January 2008); https://doi.org/10.1117/12.783799
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KEYWORDS
Charge-coupled devices

Image sensors

CCD image sensors

Scanning probe microscopy

Sensors

Interferometry

Modulation

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