Measurement of the micro-displacement of metal bar with ESPI-phaseshift method

Zhu Zheng; Li Chen; Zhibing Sun

doi:10.1117/12.783691

17 January 2008 Measurement of the micro-displacement of metal bar with ESPI-phaseshift method

Zhu Zheng, Li Chen, Zhibing Sun

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67234Y (2008) https://doi.org/10.1117/12.783691
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The technology for the measurement of a micro-displacement with ESPI-Phaseshift method has been introduced in the paper. In order to measure a micro-displacement, the technology gets laser speckle pattern interferometric information (i.e. phase information) from sample object surface in different loads with CCD camera. The phase information will be transformed into displacement information by relevant software. The micro-displacement is measured consequently. The measurement result of a sample metal bar which is fixed on one side and loaded randomly on the other side is presented in the paper. Experimental result matches well with theoretical calculation. The technology presented in the paper has higher precision than that of traditional methods, and the experimental conditions for the technology are easy to achieve.

Citation Download Citation

Zhu Zheng, Li Chen, and Zhibing Sun "Measurement of the micro-displacement of metal bar with ESPI-phaseshift method", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67234Y (17 January 2008); https://doi.org/10.1117/12.783691

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