High-performance multilayer coatings for 106 nm

Elena Yu Taracheva; Sergiy Yulin; Torsten Feigl; Norbert Kaiser

doi:10.1117/12.735482

28 September 2007 High-performance multilayer coatings for 106 nm

Elena Yu Taracheva, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 6705, Advances in X-Ray/EUV Optics and Components II; 67050Y (2007) https://doi.org/10.1117/12.735482
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

High-reflective multilayer coatings were designed at the wavelength of 106 nm and deposited by different deposition technologies (magnetron sputtering, thermal and e-beam evaporations). Various capping layers were suggested to protect Al/LiF coatings against the surface degradation. The microstructure and the surface morphology of all coatings were studied by Small Angle X-ray Reflectometry (SAXR) and Atomic Force Microscopy (AFM) methods. The optical properties were characterized in the Vacuum Ultraviolet (VUV) spectral range by VUV-reflectometry. Finally, the aging stability of coatings was studied.

Citation Download Citation

Elena Yu Taracheva, Sergiy Yulin, Torsten Feigl, and Norbert Kaiser "High-performance multilayer coatings for 106 nm", Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050Y (28 September 2007); https://doi.org/10.1117/12.735482

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available