We present our studies on preparation of LiNbO3 oriented stoichiometric thin films by sol-gel method. The technology
of synthesis of precursor systems, containing Li and Nb, has been developed. Studies of structure, morphology, optical
and physical properties were carried out. The lattice parameters have been determined and correspond to stoichiometric
lithium niobate crystals. The crystallographic orientation of LiNbO3 films corresponds to orientation of a sapphire
substrate, i.e. on substrates with orientation (0001) the C axis of film is perpendicular to a substrate surface, and on
(11-20) substrate C axes lays in a plane of a substrate. The developed method allowed to obtain lithium niobate thin
films with 300-700 nm thickness, transparent, with precise crystallographic orientation both on sapphire substrate and
conductive ZnO films.
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