Removing Interference Fringes To Improve Accuracy Of Film Thickness Spectroscopic Measurements

Piotr W Kiedron

doi:10.1117/12.938734

23 October 1986 Removing Interference Fringes To Improve Accuracy Of Film Thickness Spectroscopic Measurements

Piotr W Kiedron

Proceedings Volume 0665, Optical Techniques for Industrial Inspection; (1986) https://doi.org/10.1117/12.938734
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

Computer simulations are performed to compare effectiveness of band averaging, angle averaging, Brewster angle, multi-pass, and Fourier filtering methods of interference effect cancellation in film thickness measurement. Results indicate that the Brewster angle and multi-pass methods are superior for a 2-wavelength measuring system. Fourier filtering in the full spectrum systems offer new methods of film thickness measurement.

Citation Download Citation

Piotr W Kiedron "Removing Interference Fringes To Improve Accuracy Of Film Thickness Spectroscopic Measurements", Proc. SPIE 0665, Optical Techniques for Industrial Inspection, (23 October 1986); https://doi.org/10.1117/12.938734

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