Microstructural modification of lithium niobate crystal induced by femtosecond laser ablation

Benhai Yu; Deheng Shi; Qiguang Zheng; Peixiang Lu

doi:10.1117/12.791237

19 February 2008 Microstructural modification of lithium niobate crystal induced by femtosecond laser ablation

Benhai Yu, Deheng Shi, Qiguang Zheng, Peixiang Lu

Proceedings Volume 6625, International Symposium on Photoelectronic Detection and Imaging 2007: Related Technologies and Applications; 66251Z (2008) https://doi.org/10.1117/12.791237
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

The morphology and mechanism of lithium niobate (LiNbO₃) crystal ablated by a femtosecond laser pulse have been investigated. The ablated spots have been examined by means of scanning electron microscopy (SEM) and atom force microscopy (AFM). Sub-diffraction limit spots in LiNbO₃ crystal ablated by femtosecond laser have been obtained. The diameter of ablation spot is 400 nm and 800 nm when 170 nJ single pulse and 100 nJ, 17 pulses were used, respectively. There were about 200nm periodic ripples on the bottom surfaces of the spots at low laser energy. The result shows that the sub-diffraction limit structures may be formed by the multi-photon excitation, and the femtosecond laser ablation is an innovative tool for manufacturing LiNbO₃-based optical devices.

Citation Download Citation

Benhai Yu, Deheng Shi, Qiguang Zheng, and Peixiang Lu "Microstructural modification of lithium niobate crystal induced by femtosecond laser ablation", Proc. SPIE 6625, International Symposium on Photoelectronic Detection and Imaging 2007: Related Technologies and Applications, 66251Z (19 February 2008); https://doi.org/10.1117/12.791237

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