Resonance frequencies and modal shape characterization of piezoelectric microcantilevers

P. Sanz-González; J. Hernando; J. Vazquez; J. L. Sanchez-Rojas

doi:10.1117/12.721832

15 May 2007 Resonance frequencies and modal shape characterization of piezoelectric microcantilevers

P. Sanz-González, J. Hernando, J. Vazquez, J. L. Sanchez-Rojas

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890L (2007) https://doi.org/10.1117/12.721832
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

This paper reports a deep study of the frequency response of ZnO-based piezoelectric cantilevers. Laser vibrometry and impedance measurements have been carried out on such devices, obtaining a good agreement in the characteristic frequencies. However, certain resonances that are clearly identified thanks to the high sensitivity of the laser vibrometer do not show the corresponding impedance change. A computational model has been successfully developed to allow us to explain this behaviour based on the piezoelectric charge generated by the different modes. Finally, we discuss the essential role played by the modal shapes in the electrical detection of the resonances.

Citation Download Citation

P. Sanz-González, J. Hernando, J. Vazquez, and J. L. Sanchez-Rojas "Resonance frequencies and modal shape characterization of piezoelectric microcantilevers", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890L (15 May 2007); https://doi.org/10.1117/12.721832

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