Polarization aberration analysis using Pauli-Zernike representation

Norihiro Yamamoto; Jongwook Kye; Harry J. Levinson

doi:10.1117/12.711336

26 March 2007 Polarization aberration analysis using Pauli-Zernike representation

Norihiro Yamamoto, Jongwook Kye, Harry J. Levinson

Proceedings Volume 6520, Optical Microlithography XX; 65200Y (2007) https://doi.org/10.1117/12.711336
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Polarized illumination is a viable technique for improving the image quality and process latitude of hyper-NA lithography. On investigation of polarization effects, it is often assumed that the lens system can maintain the polarization state through optical path, which may not be the case with actual lenses. These polarization changes may cause CD variations and pattern placement errors. In this paper, we investigated a method of polarization analysis across the pupil and showed some examples of polarization aberrations. Also, we analyzed CD sensitivity and pattern placement errors from polarization aberrations. Specific terms of the Pauli Zernike representation have effects on CD and pattern placement errors, like the Zernike representation of conventional aberrations. The Pauli-Zernike representation is intuitive and useful for understanding and specifying polarization aberrations.

Citation Download Citation

Norihiro Yamamoto, Jongwook Kye, and Harry J. Levinson "Polarization aberration analysis using Pauli-Zernike representation", Proc. SPIE 6520, Optical Microlithography XX, 65200Y (26 March 2007); https://doi.org/10.1117/12.711336

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