Wet-recess gap-fill materials for an advanced dual damascene process

Tetsuya Shinjo; Satoshi Takei; Yusuke Horiguchi; Yasuyuki Nakajima

doi:10.1117/12.712461

23 March 2007 Wet-recess gap-fill materials for an advanced dual damascene process

Tetsuya Shinjo, Satoshi Takei, Yusuke Horiguchi, Yasuyuki Nakajima

Proceedings Volume 6519, Advances in Resist Materials and Processing Technology XXIV; 651930 (2007) https://doi.org/10.1117/12.712461
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

This paper describes the new developer-soluble gap fill materials, which are called wet gap fill materials, with wide process window. In order to reduce isolated/dense fill bias that comes from substrate topography, dry gap fill materials are used in combination with a plasma dry etch-back process. At the same time, the wet gap fill materials are coated thick enough to planarize all the topography and is then recessed using a standard 0.26N tetramethylammonium hydroxide (TMAH) developer. The material recess process takes place in the same track where it is coated and therefore simplifies the process and increases wafer throughput. We developed easy-to-use wet gap fill materials recently. Performances and properties of three types of wet gap fill materials (NCA2546, NCA2549, and NCA2550) based on the same polymer platforms will be discussed.

Citation Download Citation

Tetsuya Shinjo, Satoshi Takei, Yusuke Horiguchi, and Yasuyuki Nakajima "Wet-recess gap-fill materials for an advanced dual damascene process", Proc. SPIE 6519, Advances in Resist Materials and Processing Technology XXIV, 651930 (23 March 2007); https://doi.org/10.1117/12.712461

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available