Paper
9 February 2007 Nanofluidic tuning of photonic crystal circuits
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Abstract
By integrating soft-lithography-based nanofluidics with silicon nanophotonics, we demonstrate dynamic, liquid-based addressing and high &Dgr;n/n (~0.1) refractive index modulation of individual features within photonic structures at subwavelength length scales. We show ultracompact tunable spectral filtering through nanofluidic targeting of a single row of holes within a planar photonic crystal. We accomplished this with an optofluidic integration architecture comprising a nanophotonic layer, a nanofluidic delivery structure, and a microfluidic control engine. Variants of this technique could enable dynamic reconfiguration of photonic circuits, selective introduction of optical nonlinearities, or delivery of single molecules into resonant cavities for biodetection.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Erickson, Troy Rockwood, Teresa Emery, Axel Scherer, and Demetri Psaltis "Nanofluidic tuning of photonic crystal circuits", Proc. SPIE 6475, Integrated Optics: Devices, Materials, and Technologies XI, 647513 (9 February 2007); https://doi.org/10.1117/12.711490
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Cited by 1 scholarly publication.
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KEYWORDS
Photonic crystals

Nickel

Microfluidics

Nanophotonics

Dry etching

Etching

Integrated optics

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