White light displacement sensor by spectro-polarization modulator

Yukitoshi Otani; Toshitaka Wakayama; Dmitry Orlov; Norihiro Umeda; Toru Yoshizawa

doi:10.1117/12.689279

12 October 2006 White light displacement sensor by spectro-polarization modulator

Yukitoshi Otani, Toshitaka Wakayama, Dmitry Orlov, Norihiro Umeda, Toru Yoshizawa

Proceedings Volume 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV; 638205 (2006) https://doi.org/10.1117/12.689279
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

We propose a white light displacement sensor using a novel spectro-polarization modulator which generates spiral liner polarized light sorted along wavelength concentrically. It consists of a polarizer, a retarder with high order retardation, and a quarter wave plate. If we set the spiral polarizer after the spectro-polarization modulator, we can observe spectroscopic color concentrically. A displacement measurement method is proposed using chromatic aberration method and white light interferometer.

Citation Download Citation

Yukitoshi Otani, Toshitaka Wakayama, Dmitry Orlov, Norihiro Umeda, and Toru Yoshizawa "White light displacement sensor by spectro-polarization modulator", Proc. SPIE 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV, 638205 (12 October 2006); https://doi.org/10.1117/12.689279

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