3D profilometry system based on absolute phase calibration

Hao Yu; Shuangyun Shao; Zhifeng Zhang; Qibo Feng

doi:10.1117/12.716744

24 October 2006 3D profilometry system based on absolute phase calibration

Hao Yu, Shuangyun Shao, Zhifeng Zhang, Qibo Feng

Proceedings Volume 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence; 63570M (2006) https://doi.org/10.1117/12.716744
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

Improvement of absolute phase calibration in phase-measuring profilometry is presented. In order to calculate the absolute phase of calibration plane, linear interpolation of unwrapping phase of reference point is introduced. Accuracy of height calibration and measurement is improved. A novel 3D surface shape measurement system is designed. Experiments of given height plane are presented. The mean of measurement error of conventional algorithm is about 0.5 mm. That of the novel algorithm introduced in this paper is reduced to about 0.2 mm.

Citation Download Citation

Hao Yu, Shuangyun Shao, Zhifeng Zhang, and Qibo Feng "3D profilometry system based on absolute phase calibration", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63570M (24 October 2006); https://doi.org/10.1117/12.716744

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