Paper
8 September 2006 Surface inspection of hard to reach industrial parts using low-coherence interferometry
M. L. Dufour, G. Lamouche, S. Vergnole, B. Gauthier, C. Padioleau, M. Hewko, S. Lévesque, V. Bartulovic
Author Affiliations +
Proceedings Volume 6343, Photonics North 2006; 63431Z (2006) https://doi.org/10.1117/12.707806
Event: Photonics North 2006, 2006, Quebec City, Canada
Abstract
Optical inspection tools based on low-coherence interferometry and specialized for hard to reach industrial parts are presented. A common path configuration using optical fiber components is described. Small diameter probes originally developed for biomedical applications have been specialized for industrial inspection. Probes that can be used with a Cartesian surface scanning system or a cylindrical scanning system are presented. The probes include a reference that makes absolute accuracy measurements easier. Characterization of the internal surface of a worn plasma torch electrode has been realized using that technique. Surface profiling of the barrel of a gun was also performed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. L. Dufour, G. Lamouche, S. Vergnole, B. Gauthier, C. Padioleau, M. Hewko, S. Lévesque, and V. Bartulovic "Surface inspection of hard to reach industrial parts using low-coherence interferometry", Proc. SPIE 6343, Photonics North 2006, 63431Z (8 September 2006); https://doi.org/10.1117/12.707806
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Cited by 12 scholarly publications and 1 patent.
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KEYWORDS
Inspection

Interferometers

Interferometry

Optical fibers

Reflection

Electrodes

Mirrors

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