A gap sensing technique based on surface plasmon resonance

Pao Tung Wu; Meng Chyi Wu; Chien Ming Wu

doi:10.1117/12.679054

30 August 2006 A gap sensing technique based on surface plasmon resonance

Pao Tung Wu, Meng Chyi Wu, Chien Ming Wu

Proceedings Volume 6324, Plasmonics: Nanoimaging, Nanofabrication, and their Applications II; 632415 (2006) https://doi.org/10.1117/12.679054
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

A nanometer-scale gap sensing technique based on surface plasmon resonance principle is presented. A simulation to the gap sensing technique and an experimental setup to verify the simulation results have both done in this study. For simulation, Fresnel's equation was used to derive the multilayer reflectivity of KR configuration of SPR devices. The results show that the resonance angle increased when the air gap, which was within half a wavelength, between the SPR device and the glass slide was decreased. For experiment, we measured the reflectivity versus incident angle. The results verify the theoretical prediction. Utilizing this novel surface plasmon resonance gap sensing technique, we have measured an air gap down to 100 nm. The technique is better than the other methods used in nanometer-scale gap measurements.

Citation Download Citation

Pao Tung Wu, Meng Chyi Wu, and Chien Ming Wu "A gap sensing technique based on surface plasmon resonance", Proc. SPIE 6324, Plasmonics: Nanoimaging, Nanofabrication, and their Applications II, 632415 (30 August 2006); https://doi.org/10.1117/12.679054

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available