Multiphoton laser lithography for the fabrication of plasmonic components

Sven Passinger; Jürgen Koch; Roman Kiyan; Carsten Reinhardt; Boris N. Chichkov

doi:10.1117/12.680418

11 September 2006 Multiphoton laser lithography for the fabrication of plasmonic components

Sven Passinger, Jürgen Koch, Roman Kiyan, Carsten Reinhardt, Boris N. Chichkov

Proceedings Volume 6324, Plasmonics: Nanoimaging, Nanofabrication, and their Applications II; 63240U (2006) https://doi.org/10.1117/12.680418
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

In this contribution, we demonstrate multi-photon femtosecond laser lithography for the fabrication and rapid prototyping of plasmonic components. Using this technology different dielectric and metallic SPP-structures can be fabricated in a low-cost and time-efficient way. Resolution limits of this technology will be discussed. Investigations of the optical properties of the fabricated SPP-structures by far-field leakage radiation microscopy will be reported.

Citation Download Citation

Sven Passinger, Jürgen Koch, Roman Kiyan, Carsten Reinhardt, and Boris N. Chichkov "Multiphoton laser lithography for the fabrication of plasmonic components", Proc. SPIE 6324, Plasmonics: Nanoimaging, Nanofabrication, and their Applications II, 63240U (11 September 2006); https://doi.org/10.1117/12.680418

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