Thorium dioxide thin films in the extreme ultraviolet

Nicole F. Brimhall; Amy B. Grigg; R. Steven Turley; David D. Allred

doi:10.1117/12.687201

29 August 2006 Thorium dioxide thin films in the extreme ultraviolet

Nicole F. Brimhall, Amy B. Grigg, R. Steven Turley, David D. Allred

Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 631710 (2006) https://doi.org/10.1117/12.687201
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

We have measured the reflectance and transmittance of thorium dioxide thin films from 50-280 eV. We have developed several methods for fitting this data that gives the most reliable values for the complex index of refraction, n = 1 - δ + iβ. These fitting methods included fitting film thickness using interference fringes in highly transmissive areas of the spectrum and fitting reflectance and transmittance data simultaneously. These techniques give more consistent optical constants than solitary unconstrained fitting of reflectance as a function of angle. Using these techniques, we have found approximate optical constants for thorium dioxide in this energy range. We found that the absorption edges of thoria were shifted 4 eV and 2 eV to lower energies from those of thorium. We also found that the peak in δ was shifted by 3 eV to lower energy from that of thorium.

Citation Download Citation

Nicole F. Brimhall, Amy B. Grigg, R. Steven Turley, and David D. Allred "Thorium dioxide thin films in the extreme ultraviolet", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631710 (29 August 2006); https://doi.org/10.1117/12.687201

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