At-wavelength figure metrology of total reflection mirrors in hard x-ray region

Hirokatsu Yumoto; Hidekazu Mimura; Satoshi Matsuyama; Soichiro Handa; Akihiko Shibatani; Keiko Katagishi; Yasuhisa Sano; Makina Yabashi; Yoshinori Nishino; Kenji Tamasaku; Tetsuya Ishikawa; Kazuto Yamauchi

doi:10.1117/12.681587

29 August 2006 At-wavelength figure metrology of total reflection mirrors in hard x-ray region

Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Author Affiliations +

Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 631709 (2006) https://doi.org/10.1117/12.681587
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

We realized nearly diffraction-limited performance with a FWHM focal spot size of 25 nm at an x-ray energy of 15 keV at SPring-8. We explain performances of fabricated x-ray mirror, its fabrication technologies and future plan for realizing sub-10-nm focusing. We developed a novel method of at-wavelength metrology for evaluating the focusing hard x-ray beam in a grazing-incidence optical system. The metrology is based on the numerical retrieval method using the intensity distribution profile around the focal point. We demonstrated the at-wavelength metrology and estimated the surface figure error on a test mirror. An experiment for measuring the focusing intensity profile was performed at the 1-km-long beamline (BL29XUL) of SPring-8. The obtained results were compared with the profile measured by the optical interferometer and confirmed to be in good agreement with it. This technique has potential for characterizing wave-front aberration on elliptical mirrors for the sub-10-nm focusing.

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Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, and Kazuto Yamauchi "At-wavelength figure metrology of total reflection mirrors in hard x-ray region", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631709 (29 August 2006); https://doi.org/10.1117/12.681587

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KEYWORDS

Mirrors

Metrology

X-rays

Hard x-rays

Optical design

Phase retrieval

Diffraction

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