A numerical evaluation of the correlation of surface cleanliness level and percent area coverage

Radford L. Perry III

doi:10.1117/12.679621

7 September 2006 A numerical evaluation of the correlation of surface cleanliness level and percent area coverage

Radford L. Perry III

Proceedings Volume 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II; 62910L (2006) https://doi.org/10.1117/12.679621
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

The correlation of surface cleanliness defined by MIL-STD-1246B and the resulting geometric obscuration, or percent area coverage (PAC), was rigorously calculated by Ma, Fong, and Lee in 1989. This correlation is effective for surfaces that follow a distribution of particle sizes defined by a slope of -0.926. This evaluation extends the correlation of surface cleanliness level and PAC to a more generalized format, compatible with alternative distribution slopes. In addition, an attempt at determining the distribution slope from a defined slope and cleanliness level is presented.

Citation Download Citation

Radford L. Perry III "A numerical evaluation of the correlation of surface cleanliness level and percent area coverage", Proc. SPIE 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II, 62910L (7 September 2006); https://doi.org/10.1117/12.679621

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available