Paper
31 May 2006 About the possibility of interval identification of functional dependences at research of semiconductor materials in a cathodoluminescent microscopy
Yu. E. Gagarin, V. A. Khomutski, A. V. Snachev, Yu. V. Dvoryanchikova, M. A. Stepovich
Author Affiliations +
Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780N (2006) https://doi.org/10.1117/12.693209
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation
Abstract
Opportunities of reception of interval estimations of the functional dependence connecting the intensity of monochromatic cathodoluminescence with electron beam energies are considered at the account of casual character of the initial information. The account of casual character of the initial information is carried out with use of the confluence analysis. The methods of mathematical modeling receive interval estimations of functional dependences for directly zoned semiconductors.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu. E. Gagarin, V. A. Khomutski, A. V. Snachev, Yu. V. Dvoryanchikova, and M. A. Stepovich "About the possibility of interval identification of functional dependences at research of semiconductor materials in a cathodoluminescent microscopy", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780N (31 May 2006); https://doi.org/10.1117/12.693209
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KEYWORDS
Error analysis

Electron beams

Mathematical modeling

Microscopy

Semiconductor materials

Semiconductors

Analytical research

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