Performance of large chemically etched silicon grisms for infrared spectroscopy

D. J. Mar; J. P. Marsh; D. T. Jaffe; L. D. Keller; K. A. Ennico

doi:10.1117/12.671728

27 June 2006 Performance of large chemically etched silicon grisms for infrared spectroscopy

D. J. Mar, J. P. Marsh, D. T. Jaffe, L. D. Keller, K. A. Ennico

Proceedings Volume 6269, Ground-based and Airborne Instrumentation for Astronomy; 62695R (2006) https://doi.org/10.1117/12.671728
Event: SPIE Astronomical Telescopes + Instrumentation, 2006, Orlando, Florida , United States

Abstract

FORCAST is a mid/far-IR camera for use on NASA's SOFIA airborne observatory. We are fabricating monolithic silicon grisms to retrofit a spectroscopic capability for this facility-class instrument without affecting the imaging optics. The grisms will operate in the 5-8, 17-28, and 28-37 μm wavelength ranges. We will cover the 5-8 μm range in one exposure at a resolving power R=1200 with a 2 arcsecond slit using two grisms with one serving as a cross-disperser. For the 17-28 and 28-37 μm ranges, the resolving powers are R~140, 250 when used in low order with a slit of 3 arcseconds. We illustrate aspects of fabrication and testing during the grism development, and summarize the performance of the gratings at near- and mid-IR wavelengths. These gratings rely on procedures that can be used for modest sized (~10 cm) silicon pieces, thereby providing dispersive elements with good optical performance and large slit width-resolving power products from 1.2-8.1 μm and beyond 17 μm.

Citation Download Citation

D. J. Mar, J. P. Marsh, D. T. Jaffe, L. D. Keller, and K. A. Ennico "Performance of large chemically etched silicon grisms for infrared spectroscopy", Proc. SPIE 6269, Ground-based and Airborne Instrumentation for Astronomy, 62695R (27 June 2006); https://doi.org/10.1117/12.671728

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available