Femtosecond laser beam in interaction with materials for thin film deposition

Chantal Boulmer-Leborgne; Ratiba Benzerga; Deborah Scuderi; Jacques Perrière; Olivier Albert; Jean Etchepare; Eric Millon

doi:10.1117/12.669256

7 June 2006 Femtosecond laser beam in interaction with materials for thin film deposition

Chantal Boulmer-Leborgne, Ratiba Benzerga, Deborah Scuderi, Jacques Perrière, Olivier Albert, Jean Etchepare, Eric Millon

Author Affiliations +

Proceedings Volume 6261, High-Power Laser Ablation VI; 626120 (2006) https://doi.org/10.1117/12.669256
Event: High-Power Laser Ablation 2006, 2006, Taos, NM, United States

Abstract

In recent years Pulsed-Laser Deposition (PLD) has became increasingly popular as a viable deposition process for numerous materials. To overcome the main drawback of this method (macroscopic particles on the surface of the films), femtosecond (fs) lasers have been thought to be an ideal tool to obtain high quality thin films. However, it appeared that the nature of films grown by fs PLD strongly depends on the material and growth conditions. Indeed droplets are often observed evidencing the presence of violent thermal effects during the fs PLD process. In addition, the films are generally constituted by the random stacking of clusters in the 10-100 nm range that may be interesting for applications especially in the field of sensors and catalysis. In this paper, the experimental conditions leading to the formation of films composed of cluster piles without droplets will be presented. The results will be discussed as well as the possible explanations of the formation of clusters during fs PLD at the light of the literature produced in this field.

Citation Download Citation

Chantal Boulmer-Leborgne, Ratiba Benzerga, Deborah Scuderi, Jacques Perrière, Olivier Albert, Jean Etchepare, and Eric Millon "Femtosecond laser beam in interaction with materials for thin film deposition", Proc. SPIE 6261, High-Power Laser Ablation VI, 626120 (7 June 2006); https://doi.org/10.1117/12.669256

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