Improved modeling of the photoconductivity of amorphous semiconductors for the purposes of the microelectronics

A. A. Sherchenkov; A. B. Apalkov

doi:10.1117/12.683563

10 June 2006 Improved modeling of the photoconductivity of amorphous semiconductors for the purposes of the microelectronics

A. A. Sherchenkov, A. B. Apalkov

Author Affiliations +

Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 62601T (2006) https://doi.org/10.1117/12.683563
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation

Abstract

Method of the modeling of the density of charged states in the band gap of amorphous semiconductor was developed. Modeling procedure including of the fitting of different experimental dependencies of the photoconductivity with using of the same DOS model was developed. These method and procedure were applied to the a-SiGe:H films fabricated by LF (55 kHz) PECVD. The densities of charged states in the band gap of amorphous semiconductor were estimated and redistribution processes were analyzed. It was shown that deterioration of the optoelectronic properties of a-SiGe:H alloys with the increase of the germanium content is connected with the increase of recombination centers due to the N_d⁺ charged localized states. The fraction of these states appreciably increases with the increase of germanium content in the alloy.

Citation Download Citation

A. A. Sherchenkov and A. B. Apalkov "Improved modeling of the photoconductivity of amorphous semiconductors for the purposes of the microelectronics", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 62601T (10 June 2006); https://doi.org/10.1117/12.683563

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available