Measurement of polymerizing fluorocarbon plasma parameters: dynamic Langmuir probe technique application

A. Miakonkikh; K. Rudenko

doi:10.1117/12.677021

10 June 2006 Measurement of polymerizing fluorocarbon plasma parameters: dynamic Langmuir probe technique application

A. Miakonkikh, K. Rudenko

Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 62600A (2006) https://doi.org/10.1117/12.677021
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation

Abstract

In present paper the description of dynamic Langmuir probe technique is given and the results on plasma parameters obtained in ICP-discharge in pure CHF₃ gas are discussed. It was proven that using of DLP-technique is the way to obtain relevant probe data in polymerizing plasmas. Side effects of the thermionic emission from probe tip were revealed. Although emissive probes can be used to simple measure of plasma space potential, the emission can cause sufficient distortion of I-V curve, measured values of electron temperature, and EEDF curve. The effect of emission was experimentally measured and corresponding work function of electrons from probe surface was estimated.

Citation Download Citation

A. Miakonkikh and K. Rudenko "Measurement of polymerizing fluorocarbon plasma parameters: dynamic Langmuir probe technique application", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 62600A (10 June 2006); https://doi.org/10.1117/12.677021

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available