Laser Fabrication Of Interconnect Structures On CMOS Gate Arrays

John C. Whitehead; Fred Mitlitsky; David J. Ashkenas; Anthony F. Bernhardt; Steven E. Farmwald; James L. Kaschmitter; Bruce M. McWilliams

doi:10.1117/12.961147

5 August 1986 Laser Fabrication Of Interconnect Structures On CMOS Gate Arrays

John C. Whitehead, Fred Mitlitsky, David J. Ashkenas, Anthony F. Bernhardt, Steven E. Farmwald, James L. Kaschmitter, Bruce M. McWilliams

Author Affiliations +

Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961147
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

Maskless, automated, five minute interconnection of 1000 gate CMOS array die has been accomplished using discretionary laser-induced chemical vapor deposition. Eight 125-stage ring oscillators written on single CMOS gate array die were shown to have the device-limited performance of similar patterns manufactured by photolithographically patterned aluminum-silicon alloy. These results suggest the feasibility of using this method, Laser Pantography (LP), for rapid implementation of prototype and limited volume semicustom VLSI circuits immediately after their design is completed.

Citation Download Citation

John C. Whitehead, Fred Mitlitsky, David J. Ashkenas, Anthony F. Bernhardt, Steven E. Farmwald, James L. Kaschmitter, and Bruce M. McWilliams "Laser Fabrication Of Interconnect Structures On CMOS Gate Arrays", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); https://doi.org/10.1117/12.961147

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available