Applications Of Heterodyne Interferometry To Disc Drive Technology

Robert Davidson

doi:10.1117/12.961156

5 August 1986 Applications Of Heterodyne Interferometry To Disc Drive Technology

Robert Davidson

Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961156
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

The challenges to metrology provided by the extreme precision required by disc memory technology is described. Heterodyne interferometry is shown to be able to meet the metrology requirements and to provide a more direct interpretation of the results than other methods.

Citation Download Citation

Robert Davidson "Applications Of Heterodyne Interferometry To Disc Drive Technology", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); https://doi.org/10.1117/12.961156

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