Comparing identically designed grayscale (50 phase level) and binary (5 phase levels) splitters: actual versus modeled performance

Todd E. Lizotte; Orest P. Ohar; Tracie Tuttle

doi:10.1117/12.661390

25 April 2006 Comparing identically designed grayscale (50 phase level) and binary (5 phase levels) splitters: actual versus modeled performance

Todd E. Lizotte, Orest P. Ohar, Tracie Tuttle

Author Affiliations +

Proceedings Volume 6187, Photon Management II; 61870C (2006) https://doi.org/10.1117/12.661390
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Performance of diffractive optics is determined by high-quality design and a suitable fabrication process that can actually realize the design. Engineers who are tasked with developing or implementing a diffractive optic solution into a product need to take into consideration the risks of using grayscale versus binary fabrication processes. In many cases, grayscale design doesn't always provide the best solution or cost benefit during product development. This fabrication dilemma arises when the engineer has to select a source for design and/or fabrication. Engineers come face to face with reality in view of the fact that diffractive optic suppliers tend to provide their services on a "best effort basis". This can be very disheartening to an engineer who is trying to implement diffractive optics. This paper will compare and contrast the design and performance of a 1 to 24 beam, two dimensional; beam splitter fabricated using a fifty (50) phase level grayscale and a five (5) phase level binary fabrication methods. Optical modeling data will be presented showing both designs and the performance expected prior to fabrication. An overview of the optical testing methods used will be discussed including the specific test equipment and metrology techniques used to verify actual optical performance and fabricated dimensional stability of each optical element. Presentation of the two versions of the splitter will include data on fabrication dimensional errors, split beam-to-beam uniformity, split beam-to-beam spatial size uniformity and splitter efficiency as compared to the original intended design performance and models. This is a continuation of work from 2005, Laser Beam Shaping VI.

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Todd E. Lizotte, Orest P. Ohar, and Tracie Tuttle "Comparing identically designed grayscale (50 phase level) and binary (5 phase levels) splitters: actual versus modeled performance", Proc. SPIE 6187, Photon Management II, 61870C (25 April 2006); https://doi.org/10.1117/12.661390

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KEYWORDS

Binary data

Beam splitters

Data modeling

Optical fabrication

Performance modeling

Etching

Photomasks

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