The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer

L. Tian; W. Wang; X. W. Liu; X. L. Wang; Zh. Y. Bao

doi:10.1117/12.662410

21 April 2006 The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer

L. Tian, W. Wang, X. W. Liu, X. L. Wang, Zh. Y. Bao

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 61860W (2006) https://doi.org/10.1117/12.662410
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Microfluidic components are basic tools in microanalysis systems. A simple structure PDMS micro valve is described. Driven by the PZT piezoelectric actuator, this microvalve could realize to control the liquid flow rate in the microliter or submilliliter scale. The fabrication method about the PZT piezoelectric thick film with the screening printing technique and the Polydimethylsiloxane (PDMS) valve body with the soft lithography technique are presented. The optimal PZT film processing annealing temperature parameter at 800°C in 60 min could be observed, the PZT grain size is about 1μm or more. Then the silicone substrate and the drilled PDMS top substrate are bonded together with the oxygen plasm to form the chamber. The overall dimensions of the valve are 10mm x 10mm x 2mm. While the dead volume is 0.1 ml, and the inner diameter of the valve seat is 6 mm. Finally, the performance of the PDMS valve is tested.

Citation Download Citation

L. Tian, W. Wang, X. W. Liu, X. L. Wang, and Zh. Y. Bao "The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860W (21 April 2006); https://doi.org/10.1117/12.662410

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