Replication of optical rib waveguide structures using nickel shims

Mathias Bründel; Patric Henzi; Dominik Gerhard Rabus

doi:10.1117/12.661865

21 April 2006 Replication of optical rib waveguide structures using nickel shims

Mathias Bründel, Patric Henzi, Dominik Gerhard Rabus

Proceedings Volume 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration; 618508 (2006) https://doi.org/10.1117/12.661865
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

The use of conventional fabrication techniques for the fabrication of polymer based photonic integrated waveguide circuits is a necessary step to reduce costs. The replication of rib waveguides is presented using nickel shims. Results of replicated waveguides and 1 x 2 multimode interference (MMI) couplers are shown.

Citation Download Citation

Mathias Bründel, Patric Henzi, and Dominik Gerhard Rabus "Replication of optical rib waveguide structures using nickel shims", Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 618508 (21 April 2006); https://doi.org/10.1117/12.661865

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