High index fluoride materials for 193 nm immersion lithography

T. Nawata; Y. Inui; I. Masada; E. Nishijima; H. Satoh; T. Fukuda

doi:10.1117/12.657247

15 March 2006 High index fluoride materials for 193nm immersion lithography

T. Nawata, Y. Inui, I. Masada, E. Nishijima, H. Satoh, T. Fukuda

Proceedings Volume 6154, Optical Microlithography XIX; 61541A (2006) https://doi.org/10.1117/12.657247
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

We tried to investigate various kinds of metal fluoride materials which have higher gravity than CaF₂ and cubic crystal system, and we found out barium lithium fluoride (BaLiF₃) and potassium yttrium fluoride (KY₃F₁₀) as candidates for the last lens material. We have developed unique Czochralski (CZ) machines and techniques for the growth of large calcium fluoride single crystals. And we applied these technologies to the growth of fluoride high index materials. We have succeeded to grow the large BaLiF₃ single crystal with 120mm in diameter and a KY₃F₁₀ single crystal, and measured their basic properties such as refractive index, VUV transmittance, birefringence, and so on. As a result of our basic research, we found out that BaLiF₃ single crystal is transparent at VUV region, and the refractive index at 193nm is 1.64, and KY₃F₁₀ single crystal has the index of 1.59 at the wavelength of 193nm which is slightly higher than fused silica. We expect that these fluoride high index materials are useful for the last lens material of the next generation immersion lithography.

Citation Download Citation

T. Nawata, Y. Inui, I. Masada, E. Nishijima, H. Satoh, and T. Fukuda "High index fluoride materials for 193nm immersion lithography", Proc. SPIE 6154, Optical Microlithography XIX, 61541A (15 March 2006); https://doi.org/10.1117/12.657247

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available