Impact of line width roughness on device performance

G. F. Lorusso; L. H. A. Leunissen; C. Gustin; A. Mercha; M. Jurczak; H. M. Marchman; A. Azordegan

doi:10.1117/12.656128

24 March 2006 Impact of line width roughness on device performance

G. F. Lorusso, L. H. A. Leunissen, C. Gustin, A. Mercha, M. Jurczak, H. M. Marchman, A. Azordegan

Proceedings Volume 6152, Metrology, Inspection, and Process Control for Microlithography XX; 61520W (2006) https://doi.org/10.1117/12.656128
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Although various approaches can be used to quantify linewidth roughness (LWR), it is essential to determine it with sufficient confidence. Statistical fluctuations inherent to the measurement process are making correlation between performance and LWR challenging. To reduce uncertainty, line width variations and LWR need to be monitored online in full automation by CDSEM. In this paper, we use this methodology to investigate the effect of LWR on electrical performance for various device applications. Our results quantify the impact of LWR by using matching techniques.

Citation Download Citation

G. F. Lorusso, L. H. A. Leunissen, C. Gustin, A. Mercha, M. Jurczak, H. M. Marchman, and A. Azordegan "Impact of line width roughness on device performance", Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 61520W (24 March 2006); https://doi.org/10.1117/12.656128

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