Image measurement of micro-hole with linear CCD

Wenjun Wu; Bangxing Shen; Gang Shen; Shenghuai Wang; Feng Xie

doi:10.1117/12.676934

23 February 2006 Image measurement of micro-hole with linear CCD

Wenjun Wu, Bangxing Shen, Gang Shen, Shenghuai Wang, Feng Xie

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 615057 (2006) https://doi.org/10.1117/12.676934
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

It is difficult to measure micro-hole by means of project or light-sectioning. Irradiated by the collimated laser beam, a hole less than 0.5mm will result in an Airy spot because of diffraction, the Airy spot is measured by linear array CCD. A solution was given to define the diffusion state of diffraction image's edge, and two mathematical methods was presented to calculate inspection results in this paper. The first method is to integrate optoelectric signals from scanning sample spots, and the other is to calculate digital data with least square method by computer. Thus, the detection accuracy has been improved obviously.

Citation Download Citation

Wenjun Wu, Bangxing Shen, Gang Shen, Shenghuai Wang, and Feng Xie "Image measurement of micro-hole with linear CCD", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615057 (23 February 2006); https://doi.org/10.1117/12.676934

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