Multilayer integrated nano-optical devices

Jian Wang; Xuegong Deng; Xiaoming Liu; Anguel Nikolov; Paul Sciortino; Feng Liu; Lei Chen

doi:10.1117/12.646272

24 February 2006 Multilayer integrated nano-optical devices

Jian Wang, Xuegong Deng, Xiaoming Liu, Anguel Nikolov, Paul Sciortino, Feng Liu, Lei Chen

Proceedings Volume 6123, Integrated Optics: Devices, Materials, and Technologies X; 61230P (2006) https://doi.org/10.1117/12.646272
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

We report optical devices based on monolithic integration of multiple nano-structured optical functional layers. Ultraviolet (UV)-nanoimprint lithography along with thin-film deposition, high aspect-ratio reactive ion etching (RIE) and trench-filling technologies were used in fabrication and integration of individual nano-structured optical functional layers. Structures with sub-50 nm linewidth were required in order to achieve good optical performance in the near-UV and visible wavelengths. The ability to integrate multiple nanostructure-based optical layers opens a path for novel integrated optical devices, as well as a new strategy for driving both miniaturization and cost.

Citation Download Citation

Jian Wang, Xuegong Deng, Xiaoming Liu, Anguel Nikolov, Paul Sciortino, Feng Liu, and Lei Chen "Multilayer integrated nano-optical devices", Proc. SPIE 6123, Integrated Optics: Devices, Materials, and Technologies X, 61230P (24 February 2006); https://doi.org/10.1117/12.646272

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available