Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications

Emily Carr; Scot Olivier; Olav Solgaard

doi:10.1117/12.656508

23 January 2006 Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications

Emily Carr, Scot Olivier, Olav Solgaard

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130T (2006) https://doi.org/10.1117/12.656508
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

A high-stroke micro-actuator array was designed, modeled, fabricated and tested. Each pixel in the 4x4 array consists of a self-aligned vertical comb drive actuator. This micro-actuator array was designed to become the foundation of a micro-mirror array that will be used as a deformable mirror for adaptive optics applications. Analytical models combined with CoventorWare^(R) simulations were used to design actuators that would move up to 10 microns in piston motion with 100V applied. Devices were fabricated according to this design and testing of these devices demonstrated an actuator displacement of 1.4 microns with 200V applied. Further investigation revealed that fabrication process inaccuracy led to significantly stiffer mechanical springs in the fabricated devices. The increased stiffness of the springs was shown to account for the reduced displacement of the actuators relative to the design.

Citation Download Citation

Emily Carr, Scot Olivier, and Olav Solgaard "Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130T (23 January 2006); https://doi.org/10.1117/12.656508

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