Performance of a high-stroke segmented MEMS deformable-mirror technology

Michael A. Helmbrecht; Thor Juneau; Matthew Hart; Nathan Doble

doi:10.1117/12.647884

23 January 2006 Performance of a high-stroke segmented MEMS deformable-mirror technology

Michael A. Helmbrecht, Thor Juneau, Matthew Hart, Nathan Doble

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130L (2006) https://doi.org/10.1117/12.647884
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This paper presents a MEMS DM that is a hybrid of surface micromachining and bulk micromachining. The combination of fabrication techniques resulted in a DM that has demonstrated 7.6 μm stroke at 125 V, 98.6% fill factor, and excellent optical quality of better than 16 nm rms after packaging. Preliminary cyclic testing over 110 hours and 10⁷ cycles showed no noticeable changes to the actuator positions after cycling.

Citation Download Citation

Michael A. Helmbrecht, Thor Juneau, Matthew Hart, and Nathan Doble "Performance of a high-stroke segmented MEMS deformable-mirror technology", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130L (23 January 2006); https://doi.org/10.1117/12.647884

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