The effects of collateral modes on MEMS gyro bias

Terry Roszhart

doi:10.1117/12.648428

23 January 2006 The effects of collateral modes on MEMS gyro bias

Terry Roszhart

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 611304 (2006) https://doi.org/10.1117/12.648428
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

MEMS gyros are often approximated as coupled, dual mode, resonant devices that transfer energy between two mechanical modes when subjected to rotational rate. These approximations are two degree-of-freedom (DOF) analyses with a mode-to-mode coupling described by Coriolis, elastic, and damping cross terms. In practice, MEMS gyros often exhibit unused, collateral modes with resonant frequencies close to the gyro's two operational modes. These additional modes provide mechanisms for the transfer of energy that are independent of rotational rate and, as a result, can generate errors in the gyro output. The purpose of this paper is to show the effects that collateral modes have on the bias of coupled-mode rate gyros. In this paper, the conventional 2 DOF analysis is extended into a three DOF model that includes one collateral mode. It is shown that the 3 DOF model is able to predict bias errors where the 2 DOF approach does not.

Citation Download Citation

Terry Roszhart "The effects of collateral modes on MEMS gyro bias", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 611304 (23 January 2006); https://doi.org/10.1117/12.648428

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