Experimental and computational study on laser heating of surface micromachined cantilevers

Leslie M. Phinney; Olga Blum Spahn; C. Channy Wong

doi:10.1117/12.647487

5 January 2006 Experimental and computational study on laser heating of surface micromachined cantilevers

Leslie M. Phinney, Olga Blum Spahn, C. Channy Wong

Proceedings Volume 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V; 611108 (2006) https://doi.org/10.1117/12.647487
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Microsystems are potentially exposed to laser irradiation during processing, diagnostic measurements, and, in some cases, device operation. The behavior of the components in an optical MEMS device that are irradiated by a laser needs to be optimized for reliable operation. Utilizing numerical simulations facilitates design and optimization. This paper reports on experimental and numerical investigations of the thermomechanical response of polycrystalline silicon microcantilevers that are 250 μm wide, 500 μm long, and 2.25 μm thick when heated by an 808 nm laser. At laser powers above 400 mW significant deflection is observed during the laser pulse using a white light interferometer. Permanent deformation is detected at laser powers above 650 mW in the experiments. Numerical calculations using a coupled physics finite element code, Calagio, agree qualitatively with the experimental results. Both the experimental and numerical results reveal that the initial stress state is very significant. Microcantilevers deflect in the direction of their initial deformation upon irradiation with a laser.

Citation Download Citation

Leslie M. Phinney, Olga Blum Spahn, and C. Channy Wong "Experimental and computational study on laser heating of surface micromachined cantilevers", Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 611108 (5 January 2006); https://doi.org/10.1117/12.647487

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