Zero-crossing edge detection for visual force measurement in assembly of MEMS devices

Yasser H. Anis; James K. Mills; William L. Cleghorn

doi:10.1117/12.646991

23 January 2006 Zero-crossing edge detection for visual force measurement in assembly of MEMS devices

Yasser H. Anis, James K. Mills, William L. Cleghorn

Proceedings Volume 6109, Micromachining and Microfabrication Process Technology XI; 61090H (2006) https://doi.org/10.1117/12.646991
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

In this paper, a new visual force sensor is proposed to measure the microforces acting upon the jaws of passive, compliant microgrippers, used to construct out-of-plane 3-D microstructures. The vision-based force measurement technique is reduced to determining the deflections of the microgripper jaws during the microassembly process. A computer vision system is used to measure the deflections in the gripper's jaws during the joining and grasping processes. A mathematical model of the microgripper system was developed where a relation between the force and the jaw displacement was deduced. Image processing methods, such as Zero-crossing Laplacian of Gaussian edge detection and region-filling, are used. The relative positions of the microgripper jaws, with respect to the gripper's pad, are determined by means of object recognition. Performed experiments confirm the success of the proposed sensor and verify that the measured deflections comply with the profile variations of the microgripper.

Citation Download Citation

Yasser H. Anis, James K. Mills, and William L. Cleghorn "Zero-crossing edge detection for visual force measurement in assembly of MEMS devices", Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 61090H (23 January 2006); https://doi.org/10.1117/12.646991

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