Fabrication of micro-chambers and enclosures using synchronous localized electro-deposition

R. A. Said

doi:10.1117/12.645835

23 January 2006 Fabrication of micro-chambers and enclosures using synchronous localized electro-deposition

R. A. Said

Proceedings Volume 6109, Micromachining and Microfabrication Process Technology XI; 61090E (2006) https://doi.org/10.1117/12.645835
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

The presented work demonstrates that the ability of localized electro-deposition to fabricate truly three dimensional microstructures does not only require accurate control of the deposition electrode, but also demands a fabrication strategy that highly affects deposition resolution, characteristics, and the economical return of the technology. For this purpose, a synchronous deposition strategy is proposed utilizing two tip displacement algorithms. Both algorithms view three dimensional microstructures as stacks of lateral trajectories forming the structure's boundaries. In the first algorithm the synchronized tip positioning is implemented using tip stepped displacement, where the tip is moved from a point on a deposition trajectory to a neighboring location only upon sufficient deposition at the current location. The second algorithm, however, is implemented using continuous electrode displacement that allows deposition at all points along a trajectory while the tip is kept in continuous motion. The proposed synchronous deposition algorithms are demonstrated through the fabrication of micro-chambers and enclosures of arbitrary size and geometries. Comparison between both algorithms is concluded from SEM images of deposited structures in terms of deposit characteristics and strategy artifacts. The stepped displacement algorithm provides a shorter fabrication time but suffers from stepping artifacts. The continuous displacement algorithm, on the other hand, provides smooth boundaries but requires longer fabrication time that depends on the displacement speed of the deposition tip relative to the deposition growth rate.

Citation Download Citation

R. A. Said "Fabrication of micro-chambers and enclosures using synchronous localized electro-deposition", Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 61090E (23 January 2006); https://doi.org/10.1117/12.645835

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Light emitting diodes

Electrodes

Control systems

Polishing

Copper

3D microstructuring

Ions

Show All Keywords

Keywords/Phrases

Search In:

Publication Years