Active control of the ablation plume for laser ablation atomic fluorescence spectroscopy

Dasisuke Nakamura; Takayuki Takao; Yuji Oki; Mitsuo Maeda

doi:10.1117/12.645323

1 March 2006 Active control of the ablation plume for laser ablation atomic fluorescence spectroscopy

Dasisuke Nakamura, Takayuki Takao, Yuji Oki, Mitsuo Maeda

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61061A (2006) https://doi.org/10.1117/12.645323
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

We have developed an extreme sensitive trace element detection technique that has been labeled Laser ablation atomic fluorescence (LAAF) spectroscopy, and applied to a nanometer-scale solid surface analysis. The absolute weight of the detection limit of 870 ag (10^-18g) and high depth resolution of 3.6 nm had been demonstrated in trace sodium detection of polymethylmethacrylate. As a laser ablation was used in the LAAF spectroscopy, the behavior of the ablation plume is a very important factor for high sensitivity. So, we tried to control the plume by a buffer gas and an assist mask for more sensitive analysis. The diffusion velocity of the ablated particles was modified in collision with the gas molecules. Furthermore, it was found that the form of the plume was changed by the mask. Thus, improvement of the detection sensitivity of the LAAF is expected using this approach.

Citation Download Citation

Dasisuke Nakamura, Takayuki Takao, Yuji Oki, and Mitsuo Maeda "Active control of the ablation plume for laser ablation atomic fluorescence spectroscopy", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061A (1 March 2006); https://doi.org/10.1117/12.645323

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