Large-area diamond-like carbon films prepared by pulsed vacuum arc deposition on silicon lens

Hai-feng Liang; Yi-xin Yan; Qian Mi; Jun-qi Xu; Chang-long Cai

doi:10.1117/12.667687

23 January 2006 Large-area diamond-like carbon films prepared by pulsed vacuum arc deposition on silicon lens

Hai-feng Liang, Yi-xin Yan, Qian Mi, Jun-qi Xu, Chang-long Cai

Proceedings Volume 6029, ICO20: Materials and Nanostructures; 60290J (2006) https://doi.org/10.1117/12.667687
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Diamond-like carbon, as anti-reflective and protective films, are prepared on silicon lens with φ150mm diameter. The measurement results show that uniformity error is less than 3% at range of φ150mm, the peak transmittance value is near to theory value, the films have excellent wear-resistance. Films' surface roughness is less than 10 nanometer from the atomic force microscopy image.

Citation Download Citation

Hai-feng Liang, Yi-xin Yan, Qian Mi, Jun-qi Xu, and Chang-long Cai "Large-area diamond-like carbon films prepared by pulsed vacuum arc deposition on silicon lens", Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290J (23 January 2006); https://doi.org/10.1117/12.667687

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