Nano-scale chemical and biological sensors

Sven Moller; Garry D. Hinch; Kenneth J. Duda; Pavel Kornilovitch; Kevin F. Peters; Kenneth Ward; Qingqiao Wei; Xioafeng Yang

doi:10.1117/12.634534

17 November 2005 Nano-scale chemical and biological sensors

Sven Moller, Garry D. Hinch, Kenneth J. Duda, Pavel Kornilovitch, Kevin F. Peters, Kenneth Ward, Qingqiao Wei, Xioafeng Yang

Author Affiliations +

Proceedings Volume 6008, Nanosensing: Materials and Devices II; 60080I (2005) https://doi.org/10.1117/12.634534
Event: Optics East 2005, 2005, Boston, MA, United States

Abstract

Nano-engineered devices with potential for trace level detection of chemical or biological species are investigated. The sensor system is a ChemFET device based on micro- and nano-scale silicon wires. The sensor response to changes in pH reveals a significantly higher sensitivity of nano-scale devices compared to micro-scale devices. By immobilizing DNA probe molecules on the silicon wire surface, the ChemFET devices are rendered specific to this DNA sequence. Differential measurements minimize the effects of non-specific binding. At a concentration of C_DNA=10μM, two different single stranded 24-base DNA oligonucleotides have been clearly distinguished in the sensor response. DNA hybridization on the silicon wire surface is further corroborated by fluorescence spectroscopy and analysis of characteristic time constants in the sensors response.

Citation Download Citation

Sven Moller, Garry D. Hinch, Kenneth J. Duda, Pavel Kornilovitch, Kevin F. Peters, Kenneth Ward, Qingqiao Wei, and Xioafeng Yang "Nano-scale chemical and biological sensors", Proc. SPIE 6008, Nanosensing: Materials and Devices II, 60080I (17 November 2005); https://doi.org/10.1117/12.634534

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