High resolution angular measurement using surface-plasmon-resonance heterodyne interferometry at optimal incident wavelengths

Hai-Pang Chiang; Jing-Lun Lin; Railing Chang; Zhi-Wei Chen; Pui Tak Leung

doi:10.1117/12.630594

10 November 2005 High resolution angular measurement using surface-plasmon-resonance heterodyne interferometry at optimal incident wavelengths

Hai-Pang Chiang, Jing-Lun Lin, Railing Chang, Zhi-Wei Chen, Pui Tak Leung

Author Affiliations +

Proceedings Volume 6002, Nanofabrication: Technologies, Devices, and Applications II; 600218 (2005) https://doi.org/10.1117/12.630594
Event: Optics East 2005, 2005, Boston, MA, United States

Abstract

We have recently demonstrated that ultra high resolution of angular measurement down to 10^-6 degree can be achieved via surface-plasmon-resonance heterodyne interferometry, in which the phase difference between p- and s- polarized reflected waves is monitored as a function of the incident angle. Here we give a brief summary of this technique and the rationale based on which such a measurement is possible. As a further study, we have also investigated, via simulation, how the change in environmental temperature will affect the resolution limit of this very versatile technique.

Citation Download Citation

Hai-Pang Chiang, Jing-Lun Lin, Railing Chang, Zhi-Wei Chen, and Pui Tak Leung "High resolution angular measurement using surface-plasmon-resonance heterodyne interferometry at optimal incident wavelengths", Proc. SPIE 6002, Nanofabrication: Technologies, Devices, and Applications II, 600218 (10 November 2005); https://doi.org/10.1117/12.630594

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