A new methodology for quantifying OPC recipe accuracy

David Ziger; Dave Gerold; Charles King; Frank Amoroso; Joshua Tuttle; Robert Lugg

doi:10.1117/12.633172

9 November 2005 A new methodology for quantifying OPC recipe accuracy

David Ziger, Dave Gerold, Charles King, Frank Amoroso, Joshua Tuttle, Robert Lugg

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 599258 (2005) https://doi.org/10.1117/12.633172
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

An integrated methodology for developing recipes for optical proximity correction (OPC) is demonstrated. A complete implementation of software programs for generating the OPC corrections, determining mask and layout errors and automatically displaying contours of the worst violations has been accomplished. Integration of these elements facilitates recipe development by quantifying the effect of recipe changes on the overall critical dimension (CD) control. In this paper, a 65nm alternating aperture phase shift test mask is used for illustration of the method. The concept of a recipe comparison matrix is introduced to quantify the effect of recipe changes on across-chip metrics.

Citation Download Citation

David Ziger, Dave Gerold, Charles King, Frank Amoroso, Joshua Tuttle, and Robert Lugg "A new methodology for quantifying OPC recipe accuracy", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 599258 (9 November 2005); https://doi.org/10.1117/12.633172

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available