Mask rule check for inspection of leading-edge photomask

Wakahiko Sakata; Kiyoshi Yamasaki; Shogo Narukawa; Naoya Hayashi

doi:10.1117/12.633850

8 November 2005 Mask rule check for inspection of leading-edge photomask

Wakahiko Sakata, Kiyoshi Yamasaki, Shogo Narukawa, Naoya Hayashi

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 59924E (2005) https://doi.org/10.1117/12.633850
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

Leading-edge photomask, to which optical proximity correction (OPC) and dummy pattern are applied, almost always has complex patterns. Complex patterns such as "Narrow Space", "Thin Pattern", "Dummy Pattern", "Closely Face-to-Face Heads" of Posi Serifs, "Narrow Waisted Pattern" formed by a Nega Serif, "Jogs", etc. are a factor to complicate photomask manufacturing. Some the problems caused by complex patterns are increase in EB writing time, and decrease in performance of etching and cleaning process caused by Cr peeling and, above all, increase in the inspection time. Patterns whose complexity is beyond the resolution limit of inspection tool are detected as false defects. Therefore, it will greatly take time for the data investigation and re-inspection, etc. for assurance, and this causes congestion of half-finished products. To improve the process efficiency, it is necessary to locate false defects, so that the Do-Not-Inspection-Area(DNIR) or replaced with simpler patterns. In order to locate false defects, it is proposed to apply Mask Rule Check (MRC) to mask data for EB-writing.

Citation Download Citation

Wakahiko Sakata, Kiyoshi Yamasaki, Shogo Narukawa, and Naoya Hayashi "Mask rule check for inspection of leading-edge photomask", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 59924E (8 November 2005); https://doi.org/10.1117/12.633850

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available