Predicting wafer-level IP error due to particle-induced EUVL reticle distortion during exposure chucking

Vasu Ramaswamy; Andrew Mikkelson; Roxann Engelstad; Edward Lovell

doi:10.1117/12.631362

8 November 2005 Predicting wafer-level IP error due to particle-induced EUVL reticle distortion during exposure chucking

Vasu Ramaswamy, Andrew Mikkelson, Roxann Engelstad, Edward Lovell

Author Affiliations +

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 59923T (2005) https://doi.org/10.1117/12.631362
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

The mechanical distortion of an EUVL mask from mounting in an exposure tool can be a significant source of wafer-level image placement error. In particular, the presence of debris lodged between the reticle and chuck can cause the mask to experience out-of-plane distortion and in-plane distortion. A thorough understanding of the response of the reticle/particle/chuck system during electrostatic chucking is necessary to predict the resulting effects of such particle contamination on image placement accuracy. In this research, finite element modeling is employed to simulate this response for typical clamping conditions.

Citation Download Citation

Vasu Ramaswamy, Andrew Mikkelson, Roxann Engelstad, and Edward Lovell "Predicting wafer-level IP error due to particle-induced EUVL reticle distortion during exposure chucking", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 59923T (8 November 2005); https://doi.org/10.1117/12.631362

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available