RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles

M. Booth; A. Brunton; J. Cashmore; P. Elbourn; G. Elliner; M. Gower; J. Greuters; J. Hirsch; L. Kling; N. McEntee; P. Richards; V. Truffert; I. Wallhead; M. Whitfield; R. Hudyma

doi:10.1117/12.629562

7 November 2005 RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles

M. Booth, A. Brunton, J. Cashmore, P. Elbourn, G. Elliner, M. Gower, J. Greuters, J. Hirsch, L. Kling, N. McEntee, P. Richards, V. Truffert, I. Wallhead, M. Whitfield, R. Hudyma

Author Affiliations +

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 59922C (2005) https://doi.org/10.1117/12.629562
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

Key features are presented of the RIM-13 reticle imaging microscope developed for actinic aerial image monitoring of blank and patterned EUV reticles. Details of the opto-mechanical design, module layout, major subsystems including the EUV source and performance of the tool are presented.

Citation Download Citation

M. Booth, A. Brunton, J. Cashmore, P. Elbourn, G. Elliner, M. Gower, J. Greuters, J. Hirsch, L. Kling, N. McEntee, P. Richards, V. Truffert, I. Wallhead, M. Whitfield, and R. Hudyma "RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 59922C (7 November 2005); https://doi.org/10.1117/12.629562

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