CD metrology of binary and phase shift masks using scatterometry

Kyung M. Lee; Sanjay Yedur; Milad Tabet; Malahat Tavassoli

doi:10.1117/12.631971

5 November 2005 CD metrology of binary and phase shift masks using scatterometry

Kyung M. Lee, Sanjay Yedur, Milad Tabet, Malahat Tavassoli

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 59921I (2005) https://doi.org/10.1117/12.631971
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

In this paper, we report on a Scatterometry based metrology system that provides line width and thickness measurements on binary, APSM, EPSM masks both on FCCD (final check CD) and DCCD (develop check CD), fabricated on 193nm process. Measurements were made with scatterometer in DUV to visual wavelength range. Calculation of profile information was performed by a library-based analysis software. We characterized the CD uniformity, linearity, trench depth uniformity. Results show that linearity measured from fixed-pitch, varying line/space ratio targets show good correlation to top-down CD-SEM, meanwhile linearity from wide range of different pitch generally does not correlate well and therefore post-measurement calibration is needed. Depth measurements from APSM show that scatterometer makes good correlations to AFM. The effect of optical properties of the film layers on metrology performance is discussed. The data show that Scatterometry provides a nondestructive of monitoring basic etch profile combined with relatively little time loss from CD measurement step.

Citation Download Citation

Kyung M. Lee, Sanjay Yedur, Milad Tabet, and Malahat Tavassoli "CD metrology of binary and phase shift masks using scatterometry", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 59921I (5 November 2005); https://doi.org/10.1117/12.631971

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available