Visible and infrared wave-front metrology by Quadri-Wave Lateral Shearing Interferometry

S. Velghe; J. Primot; N. Guérineau; M. Cohen; B. Wattellier

doi:10.1117/12.626248

20 October 2005 Visible and infrared wave-front metrology by Quadri-Wave Lateral Shearing Interferometry

S. Velghe, J. Primot, N. Guérineau, M. Cohen, B. Wattellier

Proceedings Volume 5965, Optical Fabrication, Testing, and Metrology II; 596512 (2005) https://doi.org/10.1117/12.626248
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Based on lateral shearing interferometry, a powerful technique, called the Quadri-Wave Lateral Shearing Interferometer (QWLSI), is used to evaluate the wave-front distortions with a high accuracy. Our device can be used for the characterization of complex and very aberrant optical devices, the testing of optical components, the control of adaptive optics and also for laser beam evaluation. The particular design of the QWLSI provides him interesting properties for wave-front metrology such as a high transverse resolution, a tunable sensitivity or also an evaluation of the measurement error. An innovative interferogram analysis allows also an increasing accuracy of the measurement. After dealing with these aspects, we will conclude by presenting an experimental wave-front analysis of a femtosecond laser pulse and an analysis in the far infrared spectral range [λ=8-14 μm].

Citation Download Citation

S. Velghe, J. Primot, N. Guérineau, M. Cohen, and B. Wattellier "Visible and infrared wave-front metrology by Quadri-Wave Lateral Shearing Interferometry", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596512 (20 October 2005); https://doi.org/10.1117/12.626248

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