High-resolution FPAs on MBE-grown HgCdTe/CdTe/Ge

G. Badano; P. Ballet; J. P. Zanatta; A. Millon; C. Largeron; J. Baylet; J. Rothman; O. Gravrand; P. Castelein; J. P. Chamonal; G. Destefanis; S. Mibord; P. Costa

doi:10.1117/12.637514

14 October 2005 High-resolution FPAs on MBE-grown HgCdTe/CdTe/Ge

G. Badano, P. Ballet, J. P. Zanatta, A. Millon, C. Largeron, J. Baylet, J. Rothman, O. Gravrand, P. Castelein, J. P. Chamonal, G. Destefanis, S. Mibord, P. Costa

Author Affiliations +

Proceedings Volume 5964, Detectors and Associated Signal Processing II; 596406 (2005) https://doi.org/10.1117/12.637514
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

We report on the progress achieved in the molecular beam epitaxy of 3" and 4" HgCdTe on CdTe(211)B/Ge composite substrates, and the subsequent fabrication of high performance focal plane arrays. We first describe the growth of the heterostructures, and their characterization. Then we examine the fabrication of a 1280x1024 small-pitch focal plane array, which shows operability in excess of 99% for both the responsivity and the noise-equivalent thermal difference.

Citation Download Citation

G. Badano, P. Ballet, J. P. Zanatta, A. Millon, C. Largeron, J. Baylet, J. Rothman, O. Gravrand, P. Castelein, J. P. Chamonal, G. Destefanis, S. Mibord, and P. Costa "High-resolution FPAs on MBE-grown HgCdTe/CdTe/Ge", Proc. SPIE 5964, Detectors and Associated Signal Processing II, 596406 (14 October 2005); https://doi.org/10.1117/12.637514

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