Paper
14 October 2005 Mounting an EUV Schwarzschild microscope lens
Thomas Peschel, Henrik Banse, Christoph Damm, Ramona Eberhardt
Author Affiliations +
Abstract
A 21x Schwarzschild microscope lens for the EUV spectral range with a numerical aperture of 0.2 was designed and fabricated. The mechanical design of the lens had to comply with high requirements on surface figure amounting to 0.4 nm r.m.s. error for both mirrors. An optimized mirror mount was developed which is based on solid state hinges. In particular, gravity load, intrinsic stresses of the multilayer reflective coating as well as mounting forces and possibilities for mirror adjustment had to be considered. To provide a completely hydro-carbon free design the hinges were connected to the mirror by flux-less soldering.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Peschel, Henrik Banse, Christoph Damm, and Ramona Eberhardt "Mounting an EUV Schwarzschild microscope lens", Proc. SPIE 5962, Optical Design and Engineering II, 59621H (14 October 2005); https://doi.org/10.1117/12.625553
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KEYWORDS
Mirrors

Extreme ultraviolet

Coating

Microscopes

Solid state physics

Mirror mounts

Finite element methods

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